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MEMSnet Home: MEMS-Talk: Diffusion time of N-type spin-on-dopant on P-type wafer and Background concentration of a p-type wafer
Diffusion time of N-type spin-on-dopant on P-type wafer and Background concentration of a p-type wafer
2002-12-02
amith
Diffusion time of N-type spin-on-dopant on P-type wafer and Background concentration of a p-type wafer
amith
2002-12-02
Dear MEMS group,
  Can any one please tell me how to find out the time for diffusing
10um N-type spin-on-liquid dopant on P-type Si substrate.Do we need to
use any software to run. or its just the substitution of formulas.

  I have one more question how can we know the background
concentration of a wafer. because i got 4inch p-type (100) wafers of
resistivity 1-40 ohms/cm. I have no idea of finding the background
concentration (Nd) with the data supplied.

Thanking you,
Regards,
Amith K Arigapudi.

reply
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