Frank,
      My company developed the neat method that TI use and have a neater method
now.  We also did a lot of work on specialized plasma systems for this type of
device.  if you need further information please contact me.  Bill Moffat

-----Original Message-----
From: BERAUER,FRANK (HP-Singapore,ex7) [mailto:[email protected]]
Sent: Tuesday, December 03, 2002 9:30 PM
To: '[email protected]'; 'General MEMS discussion'
Subject: RE: [mems-talk] Anti Stiction


There is a lot more experience in this field than you know of,
because most of it is company confidential. TI has a neat method
that works well in their DMD chip manufacturing, but they won't
tell you much about it. Others publish even less.

Greetings,
        Frank Berauer
        Senior R&D Engineer
        Hewlett-Packard Singapore


-----Original Message-----
From: Jephtah Lorch [mailto:[email protected]]
Sent: Tuesday, December 03, 2002 5:31 PM
To: [email protected]
Subject: [mems-talk] Anti Stiction


It seems that there is very little experience with industrializing
anti-stiction processes namely: achieving repetitive and consistent
results.

I would appreciate any tips on suppliers and/or experts in this field.

Thks

[email protected]
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