A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Si3N4 to glass
Si3N4 to glass
2002-12-08
Enzhu Liang
2002-12-09
Imran Ghauri
Si3N4 to glass
Imran Ghauri
2002-12-09
Use silicon fusion bonding technique.
Imran
--- Enzhu Liang  wrote:
> Hi there,
>
> I have one more question: How to bond silicon
> nitride ( a silicon wafer with silicon nitride layer
> on top) to a glass wafer? Thanks.
>
> Best regards,
>
>        Enzhu Liang
> ¡¡¡¡¡¡¡¡¡¡¡¡¡¡
>
>
>
>
> _______________________________________________
> MEMS-talk@memsnet.org mailing list: to unsubscribe
> or change your list
> options, visit
>
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> Visit us at http://www.memsnet.org/


__________________________________________________
Do you Yahoo!?
Yahoo! Mail Plus - Powerful. Affordable. Sign up now.
http://mailplus.yahoo.com

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.
MEMS Technology Review
University Wafer