Hugo,
  You might try JPSA Laser at www.jpsalaser.com . Methods to avoid
surface contamination: laser machining in various reactive atmospheres
or simply leaving resist on the surface.

-Mike

>>> [email protected] 12/09/02 05:07AM >>>
Hi Hugo,

You may want to check out www.synova.ch.

They offer a water jet guided laser.

Rgds,
Randall

-----Original Message-----
From: Hugo Jazo [mailto:[email protected]]
Sent: Wednesday, December 04, 2002 12:02 AM
To: [email protected]
Subject: [mems-talk] Laser Dicing


Hello All,
Anyone know of a good laser dicing company out there?  Also, how do
people
deal with the debris that could contaminate sensitive mems devices on
the
surface?

-Hugo Jazo

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