Hi Jeetu
I think u r new commers in this (MEMS) field....some advt. i am mentioning
why people prefer Si for MEMS.
1.Take advantage of extensive experience from IC production
2.Available in very pure form "NINE NINES" and also material properties r
very well known.
3.electronics can be integrated easily...
EXCEPTIONAL PROPERTIES:
1.Yield strength 7*E09 N/Sq.M (very strong) VS. STEEL 4.2*E09 N/Sq.M
2.Density of Si< density of steel i.e relatively light than steel
3.resistivity can be from 0.5mohm-cm(doped) to 230 Kohm-cm (intrinsic).
these r few attractive features of Si.

regards
******************************
 Devendra Kr. Maurya
 Scientific Officer
Microelectronics Centre
Advanced Tech. Centre
Dept.of Electronics& ECE
I.I.T Kharagpur- 721302,INDIA
******************************
Phone: 91-3222-281479(O)
Fax  : 91-3222-755303
EMail: dkm@ece.iitkgp.ernet.in
******************************

Dear friends

Please tell why silicon is the most favourite material for MEMS
fabrication so
for.

Thanks,

Jeetu