Jeetu,
Most of the answers can be found in "Silicon as a Mechanical Material" by
Kurt Petersen
http://www.ee.ucla.edu/~jjudy/classes/ee150L/papers/Petersen_Si_as_a_Mechani
cal_Material.pdf
Loren St. Clair
Advanced MicroMachines-Goodrich Corp.
Tel: 952-892-4610
Fax: 952-892-4948
-----Original Message-----
From: Jeetu [mailto:[email protected]]
Sent: Monday, December 09, 2002 8:13 PM
To: [email protected]
Subject: [mems-talk] Si - favourite material for MEMS
Dear friends
Please tell why silicon is the most favourite material for MEMS fabrication
so for.
Thanks,
Jeetu
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