Most people use a 248nm UV laser to cut holes through Kapton
using some type of mask. IBM has published some papers on it.
Maurice H. Norcott
Senior Technician
Silicon Genesis Corporation
61 Dagget Drive
San Jose, CA 95134-2109
408-228-5852 Office
408-977-6333 Pager
408-228-5908 Lab
408-432-3832 FAX
[email protected]
-----Original Message-----
From: lucia beccai [mailto:[email protected]]
Sent: Tuesday, December 10, 2002 9:15 AM
To: [email protected]
Cc: Lucia Beccai
Subject: [mems-talk] Kapton holes cutting
Dear all,
I'm searching information about the different technical possibilities to
cut holes of 200 micron diameter in Kapton film.
The profile of the material must keep a good quality.
Any input is appreciated.
Regards,
Lucia Beccai
--
----------------------------------------------
Lucia Beccai
CRIM Lab
Polo Sant'Anna Valdera
Scuola Superiore Sant'Anna
Viale Rinaldo Piaggio 34 - 56025 -Pontedera (Pisa) - Italy
phone: +39 050 883 488
fax +39 050 883 402
http://www-crim.sssup.it/
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