Hi dear members,
I need to reduce the back reflection during my lithograpy. I do know there
are a lot of antireflective coating polymer available commercially. But I
am still wondering what is the principle behind? Is it because those
materials have large absorption coefficient or because the thickness is
controlled to be half wavelength? Also, will the antireflective coating
block everything reflected back or only those are not normal to the
interface?
Thanks!

Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716