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MEMSnet Home: MEMS-Talk: Etchable epoxy for Si/SiO2 bonding?
Etchable epoxy for Si/SiO2 bonding?
1997-05-16
Gaylin Yee
Etchable epoxy for Si/SiO2 bonding?
Gaylin Yee
1997-05-16
Anyone know of an etchable epoxy which I can use to
bond Si to SiO2/quartz/silica?

The epoxy must be thermally or room cured, nonconductive, and preferably
a low sodium/metal ion content.  I need to etch lines which are
0.4 mm in thickness.

Thanks,
Gaylin


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