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MEMSnet Home: MEMS-Talk: Metal mask for anisotropic etching in EDP, KOH
Metal mask for anisotropic etching in EDP, KOH
2002-12-16
Prem Pal
2002-12-16
kirt_williams@agilent.com
Polysilicon piezoresistive coefficient
2002-12-24
M. Amien
2003-01-02
bille@npphotonics (Bill Eaton)
Metal mask for anisotropic etching in EDP, KOH
Prem Pal
2002-12-16
Dear all
what all metals can be used as a mask during silicon ething in EDP
or KOH. any type of suggetion would be highly appreciated.
thanx


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