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MEMSnet Home: MEMS-Talk: Etch MgF2
Etch MgF2
2002-12-18
Zhimin J Yao
Etch MgF2
Zhimin J Yao
2002-12-18
Hello,

Does anybody know how to etch MgF2 about 3000 A?  Wet or dry.  It is part
of an optical coating.  Liftoff with photoresist is not an option.

Thanks,
Z. Jamie Yao


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