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MEMSnet Home: MEMS-Talk: Ohmic contacts
Ohmic contacts
2002-12-19
Milan Buncick
2002-12-20
[email protected]
Ohmic contacts
[email protected]
2002-12-20
Could you possibly have a native oxide regrowth after clean that is preventing
proper adhesion of the Au? Try a low power cf4 plasma etch prior to evap or
sputter to make sure your ohmics are free from oxide. Bob Henderson

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