Dear colleagues.

I'm trying to etch sputtered Mo and W after photo-lithography.

Could you please let me know which wet&dry etchants are effective for these
materials.

furthermore  , Adhesion ability with Au(gold) is good in these materials?

Thank you for your help , in advance.


PS .  Recommendation  of related references and papers would be appreciated.

E-mail : twlee@aerojet.snu.ac.kr