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MEMSnet Home: MEMS-Talk: Etching Al2O3
Etching Al2O3
2002-12-30
Sampo Tuukkanen
2003-01-01
BobHendu@aol.com
2003-01-06
kirt_williams@agilent.com
Etching Al2O3
Sampo Tuukkanen
2002-12-30
Dear mems-workers,

How can I etch easily Al2O3?

-Sampo Tuukkanen

________________________________
Sampo Tuukkanen, Researcher
sampo.tuukkanen@phys.jyu.fi
Room K215, Department of Physics
University of Jyväskylä, Finland
Tel. +35814 260 2392


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