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MEMSnet Home: MEMS-Talk: Greetings!!!! I Have a Question Regarding The Reaction of BN to S i
Greetings!!!! I Have a Question Regarding The Reaction of BN to S i
2003-01-06
Concepcion, Marc
Greetings!!!! I Have a Question Regarding The Reaction of BN to S i
Concepcion, Marc
2003-01-06
Greetings!!!! My name is Marc Anthony Concepcion, and I am a Process
Engineer from PerkinElmer Optoelectronics, Philippines.

I am searching on the Internet to confirm my impression that the Boron
Nitride when reacted to Silicon will result as follows:

6BN + 3Si --> 6B + N2 to Si3N4

Am I correct in the equation above??

Please e-mail me your knowledge on this. BN serves as a Source for Boron
Ions. The Boron Ions are P-Dopants to the Silicon Wafer to produce a P-Type
layer.

Thank You.



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