I am making some structures using su8 photoresist. In
addition to cracks at the sharp cornered patterns
after develop, I see millions of short cracks(? or
wringkles, looks like some droughty field) on my metal
film put on su8 resist. I did thermal evaporation to
deposit Cr film. Is this from shrinkage of su8 due to
evaporation process? Are there better ways to put on
film then? What are other kind of metals better in
terms of stiction, and other properties on su8?

-Soojin in Chapel Hill, NC

__________________________________________________
Do you Yahoo!?
Yahoo! Mail Plus - Powerful. Affordable. Sign up now.
http://mailplus.yahoo.com