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MEMSnet Home: MEMS-Talk: native oxide layer on nitride?
native oxide layer on nitride?
2003-01-09
Qintao Zhang
2003-01-09
Cain, Mike
native oxide layer on nitride?
Qintao Zhang
2003-01-09
I heard that there is a native oxide layer of 1-2 nm
on a silicon nitride layer. Is it true? In fact, I
also found some papers mentioning this. How does it
happen? Does this happen for any silicon nitride
layers? or just super thin nitride layers?

Thanks



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