Rodel (www.rodel.com) and Cabot (www.cabotcmp.com) are two of the biggest
players in CMP. Both companies sell pads and slurries.

There's a smaller company in the Northeast, Universal Photonics
(www.universalphotonics.com) that definitely makes pads, but it's unclear
what their product is for copper polish slurries.

Regards,

Bill Eaton, Ph.D.
Materials & Analysis Manager
NP Photonics
5706 Corsa Avenue, Suite 100
Westlake Village, CA  91362
Voice:  (818) 991-7044 x211
eFax:   (503) 214-5559
mailto://[email protected]

> -----Original Message-----
> From: [email protected]
> [mailto:[email protected]]On Behalf Of josh wo
> Sent: Thursday, January 09, 2003 8:39 AM
> To: [email protected]
> Subject: [mems-talk] Copper CMP
>
>
>
> Dear Experts,
> I am trying to develop a Copper CMP process using thoe PM5
> polisher that made by Logitech. Unfortunately I can't get any
> infor from them because I bought a used machine from else
> where. So, I was hoping if any one can point me to the right
> direction ......things like where to get the slurries or
> chemicals ......
>
> Thank you very much
> Josh
> --
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