Transene makes an etch called TFB for nickel
David Nemeth
Senior Process Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of Carl Arft
Sent: Thursday, January 09, 2003 2:42 PM
To: [email protected]
Subject: [mems-talk] Anyone know a good nickel etch?
I'm trying to pattern nickel with photoresist. Aqua regia seems to etch
too quickly, and leaves some nickel un-etched. Anyone have any other etch
chemistries?
thanks
please respond to: [email protected]
********************************************
Carl Arft
Dept. of Electrical and Computer Engineering
University of California, Davis
Email: [email protected]
Phone: (530) 754-9249
********************************************
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