We are using PMMA as a resist for electron beam lithography on GaAs
substrate. A
typical size for our structures is several 10nm up several 100nm. PMMA
is used with
a thickness of about 60nm.

Resently we wanted to create more complex structures. Unfortunately the
sticking of
PMMA is not high enough and therefore the structures became unstable
during the development
step (due to surface tension and other effects).

Does anyone know of a material that increases the sticking of PMMA to
GaAs?

Thank you for your help!

Best regards,

Andreas Pecher

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Andreas Pecher
Technische Physik
Universitaet Wuerzburg
Am Hubland
97074 Wuerzburg
Germany
Tel: ++49-931-888-5173
FAX: ++49-931-888-5143
e-mail:[email protected]

Privat:
Schulstr. 13
97297 Waldbuettelbrunn
Germany
Tel: ++49-931-49971

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