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MEMSnet Home: MEMS-Talk: Cr/Pt/Au metallization before HF 48% Attack
Cr/Pt/Au metallization before HF 48% Attack
2003-01-23
BenoîtGAULIER
2003-01-23
Michael Pedersen
2003-01-23
Amish Desai
Cr/Pt/Au metallization before HF 48% Attack
Amish Desai
2003-01-23
Try HF dip on Si substrate before metallization...maybe
you have oxide.
reply
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