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MEMSnet Home: MEMS-Talk: lookin for some planarization layer
lookin for some planarization layer
2003-01-27
Xiaoshan Zhu
2003-01-27
Shane Jones
lookin for some planarization layer
Xiaoshan Zhu
2003-01-27
Hi, there,

I am looking for some materials which can be spin-coated on wafer surface
and form the planarization layer. However, I don't want its thickness go up
to 200nm. In addition, there is no pinholes and no cracks.

Thank you so much!

Xiaoshan


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