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MEMSnet Home: MEMS-Talk: high frequency material losses of SiN, SiO2, Si
high frequency material losses of SiN, SiO2, Si
2003-01-29
Oberhammer Joachim
high frequency material losses of SiN, SiO2, Si
Oberhammer Joachim
2003-01-29
Hi MEMS people,

I'm looking for high frequency (GHz) material properties, especially
losses or tangent delta of the following materials:
- PECVD SiN
- LPCVD SiO2 (thermal grown)
- high resistivity Si substrate (1500 Ohm cm e.g.)

thanks,
--
------------------------------------------------------------------------------
Joachim Oberhammer, Dipl.-Ing.

Royal Institute of Technology (KTH)   Phone:    +46/(0)8 790 6250
Dept. of Signals, Sensors and Systems Fax:      +46/(0)8 10 0858
Microsystem Technology (MST)          Mobile:   +46/(0)70 692 1858
                                       e-mail:   joachim.oberhammer@s3.kth.se
Osquldas väg 10                       homepage: http://www.s3.kth.se/mst/
SE-100 44 Stockholm, Sweden

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