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MEMSnet Home: MEMS-Talk: Etch Mask
Etch Mask
2003-02-03
Baoping Guo
Etch Mask
Baoping Guo
2003-02-03
Dear all

I am trying to find solution for protecting device etching with TMAH.  How to
design the etch mask? Any type of suggestion highly appreciate.

Baoping

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