Can anyone recommend a general book on etch recipies for RIE, plasma, and/or
wet chemical?
                                        Justin.
Justin D. Mansell                | "If your opponent strikes with fire,
Ginzton Laboratory               |          counter with water."
Stanford, CA 94305               | "A true warrior is invincible because
tel: 415-725-2266                |          he contests with nothing."
fax: 415-723-2666                | "To injure an opponent is to injure
yourself."
http://www.stanford.edu/~jmansell|                              -Morihei Ueshiba