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MEMSnet Home: MEMS-Talk: Photoresist blistering during E-beam evaporation onto glass
Photoresist blistering during E-beam evaporation onto glass
2003-02-05
Timothy D. Meehan
Photoresist blistering during E-beam evaporation onto glass
2003-02-06
Mighty Platypus
Photoresist blistering during E-beam evaporation onto glass
Timothy D. Meehan
2003-02-05
I am trying to evaporate (by electron beam evaporation) Ti/Au onto glass
microscope slides and/or coverslips. The stage which backs the glass
substrates is water cooled. I have NOT seen blistering of the resist on
Si however. Has anyone seen this before? Thank you.

Tim Meehan
Superfine Group
Department of Chemistry
University of North Carolina
@ ChapelHill



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