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MEMSnet Home: MEMS-Talk: Etching holes in aluminum
Etching holes in aluminum
2003-02-10
Pablo B
2003-02-11
Bill Moffat
2003-02-13
Pablo Bianucci
2003-02-11
Michael D Martin
2003-02-13
Bill Moffat (4 parts)
Etching holes in aluminum
Michael D Martin
2003-02-11
Here are two recipes for Aluminum etching:
  1) H2O: HF 1:1
  2) HCl : HNO3 : HF 1:1:1

>>> pablob127@yahoo.com 02/11/03 09:04 AM >>>
Hi!

We need to etch some submicron holes in an Aluminum
layer  over GaAs. The holes would be patterned on PMMA
using e-beam lithography. Is there any wet chemical
etchant that will etch away the Al leaving holes of
reasonable quality? Is reactive ion etching the only
way?

Thank you very much!

Bye & Good Luck!

Pablo B.


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