--On Wednesday, February 12, 2003 12:21 PM +0000 Christabel Tan
 wrote:

> Does anybody know if SU-8 would withstand octadecyltrichlorosilane?

Depends on how you're silanizing. I've found that AZ photoresists can
resist a fluorochlorosilane we use in our lab if they're exposed to it as a
vapor. On the other hand, neat liquid silane totally strips the resist. I
believe SU-8 is generally pretty tough stuff, so if you go the vaporization
route, you should be fine. We just put a few drops of silane in a vial, put
the vial and the chips in a biological dessicator, and hook it up to house
vacuum for about an hour.

Alik