Christabel,
           My company manufactures silation equipment, see our web site,
www.yieldengineering.com.  We have not worked with SU8 except for plasma
stripping it.  If this resist has a higher layer of acid in the exposed or
unexposed resist silation should be O.K.  I can run demo's for you if you want
to test it and can ship me test units and chemical.  We have produced units for
HMDS naturally, Mercapto silanes, Amino epoxy silanes and octodeconal and
octodecanamide.  Not to sure about octadecyltrichlorosilane, is at a liquid and
what is its vapor pressure at room temperature, if it is.  I could also contact
the manufacturers of SU8 to see if we could initiate tests here.  Let me know if
we can help.  Bill Moffat

-----Original Message-----
From: Christabel Tan [mailto:c.k.l.tan@herts.ac.uk]
Sent: Wednesday, February 12, 2003 4:21 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Silanisation


Hi,

Does anybody know if SU-8 would withstand octadecyltrichlorosilane?

Christabel Tan
STRC
University of Hertfordshire
College Lane, Hatfield
Hertfordshire, AL 10 9AB
Email: c.k.l.tan@herts.ac.uk
Tel: 01707 284169
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