Hello Changsoon,

Though I haven't encountered this problem, I have put down thin layers
before. When I did thin deposition, I had to adjust the power and
deposition rate to be very low. Have you done this, or are you putting the
metals down at a high (~0.1nm/s) rate?

Also, are your wafers *very* clean?


Jesse Fowler
  UCLA/MAE Dept., 420 Westwood Plaza, Room 37-129, ENGR IV
  Los Angeles, CA 90095-1597 | (310)825-3977
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On Thu, 13 Feb 2003, Changsoon Kim wrote:

> Hi all,
>
> Au films that I deposited using an E-beam evaporator
> have some spherical lumps of Au on the surface.
> The radius of the spheres are 200 nm ~ 2 um, and
> the samples are Si/2.5nm Cr/5nm Au.
>
> Can some of you let me know why this happens and
> how I can avoid it?
>
> Thanks,
>
> Changsoon Kim
>
> Dept. of Electrical Engineering
> Princeton University