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MEMSnet Home: MEMS-Talk: Moat Etch, thick poly & grind/polish
Moat Etch, thick poly & grind/polish
2003-02-15
[email protected]
Moat Etch, thick poly & grind/polish
[email protected]
2003-02-15
All,

I don't mean to spam this group, but, we have a fab  that speciallizes on
dielectric isolation on 4" Si wafers.  We can offer services that many MEMS
designers/manufacturers are asking for, i.e. moat etch, oxidation, thick
polysilicon (700+um) and  grind/polish with +- 2 um thickness control,
sub-micron TTV's and angstrom Ra's.  No job too large or small.

Feel free to email or give me a call.

Thanks,

Jim Girouard
THAT Corporation
508-478-9200 x 129
[email protected]

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