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MEMSnet Home: MEMS-Talk: polymer bonding
polymer bonding
2003-02-19
[email protected]
polymer bonding
[email protected]
2003-02-19
Hello everybody,

Can anyone give me some comments what level of surface roughness, or uniformity,
is required in order to achieve void-free adhesive wafer bonding?

Thank you & best regards,
Kasey Ma
Agilent Technologies Singapore


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