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MEMSnet Home: MEMS-Talk: Cl- and Br-contained plasma - toxic?
Cl- and Br-contained plasma - toxic?
2003-02-14
Isaac Wing Tak Chan
2003-02-18
Martin.WALKER@oxinst.co.uk
2003-02-18
Isaac Wing Tak Chan
2003-02-20
Burkhard Volland
2003-02-20
BobHendu@aol.com
Cl- and Br-contained plasma - toxic?
BobHendu@aol.com
2003-02-20
Martin:

Thank you for taking the time to provide a very good detailed working safety
outline for anyone working with plasma etch systems. This tells me that Oxford
has quality people working for it and your published response should be reviewed
by everyone working with plasma etch tools. Thanks Bob Henderson

reply
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