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MEMSnet Home: MEMS-Talk: Photopatterning
Photopatterning
2003-02-25
sandhya sandhya
2003-02-27
Abhinav Bhushan
2003-03-10
David Nemeth
2003-03-09
Zbigniew P. Sobczak
Photopatterning
sandhya sandhya
2003-02-25
Hello

I am sandhya, a research student . Can ,anyone say me how to apply
photoresist(spin) on a wafer having holes in it and pattern them. we are using
SPR 200 series positive resist.

Thanks

sicerely,

Sandhya





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