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MEMSnet Home: MEMS-Talk: about pressure sensor
about pressure sensor
2003-02-25
sreeram mahalingam
about pressure sensor
sreeram mahalingam
2003-02-25
Hello ,
 I am currently working on pressure sensor (Using
surface micromachining technology).
 I am supposed to choose among the two etchants
1)Water
2)Pentane
Which shows good response witout sticking.
Could any one suggest me the best possible etchant
here.
Thanks in advance
Regards
sree

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