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MEMSnet Home: MEMS-Talk: Helium gas sensor ...?
Helium gas sensor ...?
2003-03-01
唐偉德
how to fabricate the cantilevers on a wafer?
2003-03-02
ramji dhakal
2003-03-04
kozlov
Helium gas sensor ...?
唐偉德
2003-03-01
Dear all,

Does anyone know the working principle of helium gas sensor ?
Or inform me the related paper about this sensor.
Thank you a lot.

Weider Tang
National Tsing Hua Univ. Taiwan
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