Hi all,
as far as for the wet etching, most likely TMAH might
do the job, otherwise vapor etching by Xenon Fluoride.
If you wish to test your sample, you can send us your
wafer and we will etch them for you. As simple as
that. The turnaround is approximately one week plus
shipping delay. A few wafers are assumed to be samples
and we will do it free of charge. Either email me at
[email protected] or have a look at the system at the
web site: http://www.pentavacuum.com/mems.htm
Pavel

By the way, there is an excellent reference book
called “Handbook of metal Etchants by CRC press” and
you might find a lot of information there. In my
opinion, this is the most
useful book I have ever used.


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