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MEMSnet Home: MEMS-Talk: Is the interface of polysilicon and Cr Ohmic contact ?
Is the interface of polysilicon and Cr Ohmic contact ?
2003-03-03
[email protected]
2003-03-07
[email protected]
Is the interface of polysilicon and Cr Ohmic contact ?
[email protected]
2003-03-03
Dear all,


I have a question about polysilicon / Cr interface.
Is the interface Ohmic contact or Schottky barrier?
How can I measure it?
Does the dopant of polysilicon matter?
If I want Ohmic contact, how can I do to improve it?

Thanks very much!


Best regards,

GreenWay



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