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MEMSnet Home: MEMS-Talk: photoelastic coefficients
photoelastic coefficients
1997-07-08
"Veronique Gorel (µ97)"
photoelastic coefficients
"Veronique Gorel (µ97)"
1997-07-08
I am looking for the Silicon Nitride (Si3N4) photoelastique coefficients.
Especially, PECVD deposited thin film in Silicon Nitride.

Thank you very much.


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