*************************   Reply Delimiter   *****************************

Suggest you contact:

        Lufran, Inc.
        10200 Wellman Road
        Streetsboro, Ohio   44241

        Telephone:  (216) 655-9797
        Telefax: (216) 656-3500

        Their wet chemical etch product line is known as the "superbowl" series
of products.

Best regards,

Ed Kolesar


+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++
                      Edward S. Kolesar, PhD. P.E.
                W.A. Moncrief Professor of Engineering
                      Texas Christian University
                      Department of Engineering
                      Electrical Engineering Laboratories
                      Campus Box 298640
                      2800 South University Drive
                      Fort Worth, TX   76129
       Internet E-mail:  kolesar@zeta.is.tcu.edu
       Telephone: (817) 921-7722 ext. 6226 (Direct)
                  (817) 921-7126; 7677 (Secretary)
       TeleFAX: (817) 921-7136; -7704; -7333
+++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++++



**************************   End of Reply   *********************************

We are planning to modify our current KOH-etching equipment.

Our etcher is just for water-circulating bath, so it isn't
so good for etching of silicon using KOH soluton. So we are
looking for other baths which are commercially made.

Desired spec is as follows :


   - Operation Temperature 40-80 degree C
   - Homogeneous distribution of temperature
   - Condenser which can maintain etchant at constant concentration

   Optional : Capability of running under ultrasonic sound

Could any of you tell me a equipment or providers that sell
this etching bath ?

Seong-Hyok Kim
Lab. for MiSA
#301-1104, School of Elec. Eng.,
Seoul National University, San 56-1
Shillim-dong, Kwanak-gu,
Seoul 151-742 Korea

Fax : +82-2-873-9953
E-mail : popinjay@plaza.snu.ac.kr

WWW : http://plaza.snu.ac.kr/~micro


From ROLAND A. LEVY, MATERIALS SCIENCE, (201) 596-3561 Mon Jul 14 16:10:24 1997
To: mems@isi.edu
Subject:   Sputtering System
From:   "ROLAND A. LEVY, MATERIALS SCIENCE, (201) 596-3561"
Date: Mon Jul 14 16:10:24 1997
Lines: 6

There was a recent inquiry from an organization seeking a sputtering system
with load lock and substrate heating capabilities. Should that organization
be still interested in such a system, they should contact me because there
may be one available.

R. Levy