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MEMSnet Home: MEMS-Talk: Deposition of Au into a microchannel
Deposition of Au into a microchannel
2003-03-10
[email protected]
2003-03-12
Likun Zhu
2003-03-11
Roger Shile
2003-03-11
[email protected]
Deposition of Au into a microchannel
Likun Zhu
2003-03-12
Try sputtering.

--- [email protected] wrote:
>
> Hi all,
>
> I am trying to deposit Au layer on the surface of a
> microchannel, both the
> walls and the bottom.  However, by evaporation the
> gold only deposits at the
> bottom surface;  the walls of the channel are not
> covered.  I am wondering if
> someone has experience solving this problem.
>
> Thanks alot!
>
> Zhiyu
>
>
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