Two of the earliest references are in the Transducers 91 digest:
O. Tabata et al., p. 811, "Anisotropic etching of silicon ..."
U. Schnakenberg et al., p. 815 "TMAHW etchants for silicon micromachining"
(These papers may also have been published in Sensors and Actuators)

Since then, not that much has been published, although many people now use TMAH.
Les Landsberger at Concordia Univerity has been doing some nice work on
TMAH etching and corner compensation; see:
* B. Nikpour et al,, Transducers 97 Digest Vol. 1, p. 691
* L. Landsberger et al., JMEMS Vol. 5, p. 106, 1996 (this paper has a long
list of references; check it out!)

Another reference that should be easy to find is:
A. Merlos et al., Sensors and Actuators, vol. A37-38, p. 737, 1993.

Luc Bousse
Caliper Technologies Corp.


>Hi, I'm looking for information on silicon etching using TMAH.  Does
>anybody know where I could find such info.  Thanks.
>
>
>---
>Alex Jovel
>[email protected]
>
>