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MEMSnet Home: MEMS-Talk: dielectric layer
dielectric layer
2003-03-17
Hell, Erwin
2003-03-17
Roger Shile
dielectric layer
Hell, Erwin
2003-03-17
Hi all,
does anyone has experience/knowledge about anodic bonding with a dielectric
layer between  glass and silicon? How does it affect the bond quality?

Any recommendations are appreciated

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SUSS MicroTec
Hell Erwin
Product Specialist
Aligner & Bond Systems
Schleissheimerstr.90
D-85748 Garching
Germany
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Tel.    +49 (0) 89 32007 307
Fax.    +49 (0) 89 32007 162
Cell:   +49 (0) 170 5386531
Email:  hell@suss.de
Int:    http://www.suss.com

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