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MEMSnet Home: MEMS-Talk: AZ 9260-100 micron thick resist
AZ 9260-100 micron thick resist
2003-03-19
martin thornton
2003-03-19
Neal Ricks
2003-03-19
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AZ 9260-100 micron thick resist
martin thornton
2003-03-19
Hi everyone,
Im starting to use AZ 9260 resist and would like to build the resist
thickness up to 100 to 150 microns the predicted light transmition limit
for use as a electrodeposition mould.
Since I do not have a co rotating cover I will have build up the
thickness with multiple spins.
As a starting point Im using the process recommendation for AZ 4562 100
micron given by the supplier.

Does anyone have a nailed down receipe for AZ 9620 for a 100 micron
resist ?

thanks in advance,

Dr. Martin Thornton


CEA saclay
Ormes des Merisiers
Gif sur Yvette
91191
France

Tél: + 33 1 69 08 51 34
Fax: +33 1 69 08 87 86


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