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MEMSnet Home: MEMS-Talk: about growth of SiN layer on porous silicon?
about growth of SiN layer on porous silicon?
2003-03-19
高 晓童
2003-03-19
Marc Christophersen
about growth of SiN layer on porous silicon?
高 晓童
2003-03-19
Dear All,
    Is there anyone who have grown SiN on porous silicon? I want to know
what the structure of the SiN layer is, solid or porous?
    Thank you!

Xiaotong Gao
03/19/2003

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