A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Overlay between front and back of wafer
Overlay between front and back of wafer
2003-03-19
Mark van der Heijden
2003-03-19
Roger Brennan
2003-03-19
Luesebrink Helge
2003-03-19
Shay Kaplan
2003-03-19
Brubaker Chad
2003-03-20
Phillipe Tabada
Overlay between front and back of wafer
Mark van der Heijden
2003-03-19
Hi All,

Does anyone know of a method/device to measure which i can use to measure
the overlay between structures on the front and the back of a wafer.

Thanks,
Mark




_________________________________________________________________



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
University Wafer
Mentor Graphics Corporation
The Branford Group