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MEMSnet Home: MEMS-Talk: AZ 9260-100 micron thick resist
AZ 9260-100 micron thick resist
2003-03-19
martin thornton
2003-03-19
Neal Ricks
2003-03-19
scotttb@umich.edu
AZ 9260-100 micron thick resist
scotttb@umich.edu
2003-03-19
Dear Martin,
I routinely use AZ 9260 photoresist and found out that you can request
information from the manufacturer.  For instance, they have information on spin
rate and time to achieve a certain thickness.  If you want I can send the
processing information I have but it only tells you about thicknesses ranging
from 6 to 24 um.
Scott

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