Hello everyone,

The list archive shows that several of you have used spin on dopants
before.  Our lab is considering introducing one of these products and we
are assessing our risk for contamination.  Can you please comment on what
controls are needed to prevent contamination from these products?
Certainly basic controls such as limiting use to a single coater or a
single bowl and spinner, and limiting use to dedicated labware, are
required.  Is that sufficient?  Some of us are concerned that the dopant
may be transported through vapors or particles given off during the spin
coat.  Is this a risk, or is a properly exhausted coater sufficient to
prevent this?  What other known risks are there for possible
contamination?  Thanks in advance for any insight you can provide.

regards,
Aaron Glatzer
Process Engineer
University of Michigan
Solid State Electronics Laboratory