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MEMSnet Home: MEMS-Talk: Q: piezoelectrics & evaporation
Q: piezoelectrics & evaporation
1997-07-25
W.J.Karl
Q: piezoelectrics & evaporation
W.J.Karl
1997-07-25
 Hello,

    I'm wondering which piezoelectric materials have been
    successfully deposited by evaporation. Most of the
    thin films in literature seem to be sputtered (e.g PZT).
    Any hints are welcome,

    Werner.
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