I work for a company making Glass Frit Wafer Bonding Equipment since 1989.
Klaus Ruhmer
Electronic Visions, Inc.
kruhmer@dancris.com

-----Original Message-----
From:   CAIGOR@aol.com [SMTP:CAIGOR@aol.com]
Sent:   Thursday, July 24, 1997 11:05 AM
To:     MEMS@ISI.EDU
Subject:        frit glass bonding

Recently I discovered, that frit glass wafer to wafer bonding process is
patented only couple of years ago. I am looking for any references at this
technique , older then 1990 year.
Igor I. Sluchak


From Torsten Gerlach, TU Ilmenau, F.R.G. Thu Jan 23 16:10:33 1997
To: mems@isi.edu
Subject:   photoemulsio nasks
From:   "Torsten Gerlach, TU Ilmenau, F.R.G."
Date: Thu Jan 23 16:10:33 1997
Lines: 60

Dear Prof. Smits,

we are using 4" "MILIIMASK" photoemulsion masks from Agfa-Geveart.
They offer plates from 2x2" through 5x5" at a netto price ranging
between DM 130/30pcs for the smallest and DM 330/20pcs for the
largest ones. (Other sizes on request) Unfortunately I do not know
whether they have a dependance in the U.S. (but probably they do) The
adress in Germany is
    Agfa Deutschland Vertriebsgesellschaft mbH & Cie.
    Grafische Systeme
    P.O. Box 10 01 42
    D-50441 Koeln
    phone +49 / 221 / 5717-340
    fax                   -332

Hoping this will help you,

Dr. Torsten Gerlach

Technical University of Ilmenau
Faculty of Mechanical Engineering
Dept. of Microsystem Technology
P.O. Box 0565
D-98684 Ilmenau
Germany


> Date sent:      Tue, 21 Jan 1997 17:57:51 -0500 (EST)
> From:           JGS@enga.bu.edu
> Subject:
> To:             MEMS@ISI.edu
> Send reply to:  JGS@enga.bu.edu

> Dear MEMS Friends,
>
> We have been using   photographic glass plates as masks, with emulsion in our
> step and repeat camera and our first reduction camera, for a couple of years.
> For the step and repeat camera we used Kodak A1 type emulsion  on 4" x  4"
> plates, while we used the same emulsion on 2" x   2" plates. When we recently
> wanted to order a new supply of these plates, we heard that Kodak  will stop
> fabricating those plates.  Does any body know if there is another manufacturer
> of these plates?
>
> If you know any  other manufacturer, please be  so kind to inform us.
>
>
>
> J.G.Smits,
>
> Associate Professor, Boston University
>
> 44 Cummmington Street, Boston, MA 02215
>
> Phone (617)353-9878
>
> Fax(617)353-6440
>
> email : jgs@enga.bu.edu"
>
>